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光学三维形貌测试仪（Xi-100）
膜厚测试仪（SR-2）
感应耦合等离子体刻蚀机（STS LPX ICP ASE-SR）
箱式真空镀膜机（ZZS550-2/G）
槽式兆声清洗机（W-357HP）
Total14 2/2
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